Abstract-This paper describes the instructional design, implementation, and assessment of a virtual laboratory based on a numerical simulation of a chemical vapor deposition (CVD) process, the virtual CVD laboratory. The virtual CVD laboratory provides a capstone experience in which students synthesize engineering science and statistics principles and have the opportunity to apply experimental design in the context similar to that of a practicing engineer in industry with a wider design space than is typically seen in the undergraduate laboratory. The simulation of the reactor is based on fundamental principles of mass transfer and chemical reaction, obscured by added "noise." The software application contains a 3-D student client that simulates a cleanroom environment, an instructor Web interface with integrated assessment tools, and a database server. As opposed to being constructed as a direct one-to-one replacement, this virtual laboratory is intended to complement the physical laboratories in the curriculum so that certain specific elements of student learning can be enhanced. Implementation in four classes is described. Assessment demonstrates students are using an iterative experimental design process reflective of practicing engineers and correlates success in this project to higher order thinking skills. Student surveys indicate that students perceived the virtual CVD laboratory as the most effective learning medium used, even above physical laboratories.

No abstract

BS and MS degrees from UCSD and Ph D from UC Berkeley, all in chemical engineering. Professor Koretsky's research interests are in thin film materials processing including: plasma etching, chemical vapor deposition, electrochemical processes and chemical process statistics. He is author of the book, Engineering and Chemical Thermodynamics (Wiley, 2004). Shoichi Kimura, Oregon State University Sho Kimura is a Professor of Chemical Engineering at OSU. Professor Kimura's research interests cover high-temperature materials synthesis, nano-sized materials synthesis, surface modifications, applications of high-temperature fluidization technology, reaction kinetics, catalytic effects on gas-solid reactions, and reactor design and simulations. Connelly Barnes, Oregon State University Connelly Barnes is an undergraduate student in Computational Physics and Mathematics at OSU. Connelly is the programmer for the software ThermoSolver which accompanies the text Engineering and Chemical Thermodynamics. Danielle Amatore, Oregon State University Danielle Amatore is A PhD candidate in Chemical Engineering at OSU. Her thesis focuses on educational methods, including assessment of complex cognitive processes. Danielle received her BS in chemical engineering from OSU and her MS from the University of Washington.

-The Virtual CVD Learning Platform provides a capstone experience in which students synthesize engineering science and statistics principles. They apply Design of Experiments (DOE) in the context similar to that of industry with a wider design space than is typically seen in the undergraduate lab. The Virtual CVD Learning Platform contains a numerical simulation of a chemicalvapor deposition (CVD) reactor and is based on fundamental principles of mass transfer and chemical reaction, obscured by added "noise." The Virtual CVD Learning Platform is available for interested educators; moreover, it is self-contained so that it can be placed with versatility where it fits in a given program's curriculum. While the platform chosen is specific to the microelectronics industry, it is expected the lessons learned may be applied to any process. The software application contains a 3D graphical user interface, the calculation engine, a database, and an instructor interface with integrated assessment tools. A robust assessment plan using a model of cognition based on a modification of Bloom's taxonomy of learning is described. This assessment was implemented in Winter 2006.

has a research focus on engineering education, with a special interest in applying qualitative research to assess learning in the engineering classroom. In addition, she has developed curriculum built on active learning for nanoelectronics at the graduate and undergraduate levels, as well as for K12 level. She obtained experience in the semiconductor industry while working at Intel and LSI Logic. Edith Gummer, Northwest Regional Educational LaboratoryEdith Gummer is the Director of the Classroom-Focused Research and Evaluation Program for the Center for Classroom Teaching and Learning at the Northwest Regional Educational Laboratory. She coordinated the structure of the research design and the data collection and analysis processes of the project. She has been faculty in science and mathematics education quantitative and qualitative research design courses at the doctoral level. She has been involved in the development of innovative mathematics curricular activities and formative assessment in mathematics problem solving.