The simplificd scheme has been suggested for quantitative estiniation of the effect of natural convection on the L P E layers thickness while growing from a finite solution with parallel horizontal and vertical substrates. The convective-diffusive mass transfer modcl is being developed on the base of boundary layer approximation. I n the case of horizontal growth the layer thickness is determined by effective solution thickness which is distinguished for an upper and lower substrate and depends on convection intensity. For the vertical growth system the expression describing the variation of layer thickness along the substrate has heen obtained and the vertical temperature gradient necessary for vliininating a wedge shaped growth in this case is calculated.The experimental investigations of LPE growth of GaP layers from finite solution with horizontal and vertical substrates are carried out. The thickness and shape of L P E layers obtaincd i n both cases coincide well with results of calculation. HpeAnomeHa ynpoweeaafi cxeMa HJIR KOJIHYeCTBeHHO$i o u e~~n BJIHHHAR ecTecTBeEr-IIOB ICOHBeKUUll Ha TOJIUIMHY 3nHTaKCHaJILHbIX CJIOeB IIpH BbIpanI11BaHMki 113 Orpa€IMYeII-IIOI'O ~laCTRO1)a-paCnJIaBa C napaJIJIeJIbHbIM11 rOp1130HTaJIbHbIM11 11 BepTAlieiITamIme mcneAosaHmE >K@3 pocTa G a p cnoes 83 orpaHmeHHoro pacTBopa-paccnywnx TOJIIUIIII~I II @opnibI cnoeB x o p o l~o cornacymTcR c pe3ynLTanm pacqcTa. IlJIaHa C rOP1130HTaJIbHbIMki 11 BePTM€C~JILIIhIMH nO&JIOmKaMEi. HOJIyWIIHLIe B 06011X
IntrodudionI t is known that in a liquid phase epitaxial (LPE) growth the solute deposition on the substrate occiirs as a result of supersaturation created by a continuous solute transport to the growing interface. Therefore, the hydrodynamic state of liquid phase and mass transfer kinetics may play important role in LPE process. Some experimental results (HARRIS; LONG et al.; KONIG, KECK; KEGBL, KGUYEN TIIANH SGHI) showed that mass transfer in many cases of LPE growth is not described by the diffusion mechanism only. The variation of layers' thickness under otherwise similar growth conditions observed may be explained by different contribution of natural convection in mass transfer process. I n order t o improve reproducibility of LPE growth and to control the layer thickness uniformity, particularly for mass production, the influence of natural convection on mass transfer kinetics must be
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.