We demonstrate monolithic aluminum gallium arsenide (AlGaAs) optical anoantennas.Using a selective oxidation technique, we fabricate such epitaxial semiconductor nanoparticles on an aluminum oxide substrate. Second harmonic generation from an AlGaAs nanocylinder of height h=400 nm and varying radius pumped with femtosecond pulses delivered at 1554-nm wavelength has been measured, revealing a peak conversion efficiency exceeding 10 -5 for nanocylinders with an otpimized geometry.

We review recent achievements in the field of nanoscale nonlinear AlGaAs photonics based on all-dielectric optical antennas. After discussing the motivation and main technological challenges for the development of an AlGaAs monolithic platform for χ nonlinear nanophotonics, we present numerical and experimental investigations of the second-order nonlinear response and physical reasons for high efficiency of second-order nonlinear interactions in the AlGaAs nano-antennas. In particular, we emphasize the role of the dipolar resonances at the fundamental frequency and the multipolar resonances at the second harmonic wavelength. We also discuss second-harmonic generation directionality and show possible strategies to engineer the radiation pattern of nonlinear antennas.

Manipulating light at the nanoscale by means of dielectric nanoantennas recently received renewed attention thanks to the development of key enabling fabrication tools in semiconductor technology, combined with the extremely low losses exhibited by dielectrics in the optical regime. Nanostructures based on III-V type semiconductors, characterized by an intrinsic broken symmetry down to a single elementary cell, has already demonstrated remarkable nonlinear conversion efficiencies at scales well below the operating wavelength. In this Letter, we thoroughly investigate the emission properties of second-harmonic generation (SHG) in AlGaAs monolithic nanoantennas. Our findings point toward the pivotal role of volume susceptibility in SHG, further unraveling the physics behind the nonlinear processes in these systems. The extremely high SHG efficiency attained, together with the control over the polarized emission in these nanoantennas, constitute key ingredients for the development of tunable nonlinear metasurfaces.

All-dielectric metasurfaces consist of two-dimensional arrangements of nanoresonators and are of paramount importance for shaping polarization, phase, and amplitude of both fundamental and harmonic optical waves. To date, their reported nonlinear optical properties have been dominated by local features of the individual nanoresonators. However, collective responses typical of either Mie-resonant metamaterials or photonic crystals can potentially boost the control over such optical properties. In this work we demonstrate the generation of a second harmonic optical wave with zero-order diffraction, from a metasurface made out of AlGaAs-on-AlOx nanocylinders arranged with spatial period comparable to the pump telecom wavelength. Upon normal incidence of the pump beam, the modulation of Mie resonances via Bragg scattering at both fundamental and second harmonic frequencies enables paraxial second harmonic light generation by diffraction into the zero order, with a 50-fold increase in detected power within a solid angle of 5°. Exquisite control of a higher harmonic wavefront can be thus achieved in all-dielectric nonlinear metasurfaces, with potential applications for on-axis optical systems.

Background: Dielectric nanoantennas have recently emerged as an alternative solution to plasmonics for nonlinear light manipulation at the nanoscale, thanks to the magnetic and electric resonances, the strong nonlinearities, and the low ohmic losses characterizing high refractive-index materials in the visible/near-infrared (NIR) region of the spectrum. In this frame, AlGaAs nanoantennas demonstrated to be extremely efficient sources of second harmonic radiation. In particular, the nonlinear polarization of an optical system pumped at the anapole mode can be potentially boosted, due to both the strong dip in the scattering spectrum and the near-field enhancement, which are characteristic of this mode. Plasmonic nanostructures, on the other hand, remain the most promising solution to achieve strong local field confinement, especially in the NIR, where metals such as gold display relatively low losses. Results: We present a nonlinear hybrid antenna based on an AlGaAs nanopillar surrounded by a gold ring, which merges in a single platform the strong field confinement typically produced by plasmonic antennas with the high nonlinearity and low loss characteristics of dielectric nanoantennas. This platform allows enhancing the coupling of light to the nanopillar at coincidence with the anapole mode, hence boosting both second- and third-harmonic generation conversion efficiencies. More than one order of magnitude enhancement factors are measured for both processes with respect to the isolated structure. Conclusion: The present results reveal the possibility to achieve tuneable metamixers and higher resolution in nonlinear sensing and spectroscopy, by means of improved both pump coupling and emission efficiency due to the excitation of the anapole mode enhanced by the plasmonic nanoantenna.