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A half-bridge driver with integrated power switches has been designed and verified experimentally using the Philips EZ-HV SOI process. A 30W, 400V input class-D series resonant inverter using this power module was demonstrated to operate successfully at 1MHz with 90% efficiency and only 0.19W power loss in the half-bridge driver. This integrated SOI approach offers a significant performance improvement and component reduction over the bulk-technology-based high-voltage highfrequency driver solution.