Aluminum layers protected with fluoride coatings have been deposited by evaporation and characterized with respect to their suitability as vacuum ultraviolet (VUV) mirrors. Optical characterization has been performed by spectrophotometry, while the surface quality of the layers has been judged by means of x ray reflection, scanning electron microscopy, and atomic force microscopy. In particular, protection with aluminum fluoride results in superior VUV reflection properties. VUV reflectance values between 80% and nearly 90% have been verified even two years after deposition and exposure to the atmosphere.

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Micro-optical structures for VUV laser beam shaping and wave-front sensing were manufactured by thin-film deposition onto CaF2 and transfer by etching. Arrays of Bessel-like F2 laser beams at a wavelength of 157 nm with extremely small conical angles were generated by microaxicon lenses. Beam propagation was studied in simulations and experiments. Apodization by absorbing layers is proposed for beam cleaning.