Using advanced depth-sensitive hardness measurements, the homogenous nucleation of dislocations has been observed in dislocation-free single crystals. This process is related to a sudden displacement jump in the force-displacement curve. The mechanical stress for the set-in of this pop-in effect has been estimated with the Hertzian elastic contact theory. Experimental results of dislocation loop nucleation show good agreement with the continuum theory of dislocations. Electron microscopy provides a direct proof of dislocation nucleation during nanoindentation.

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