Multilayers consisted of Cu and AISI 310S steel fabricated on a Si(100) monocrystalline silicon substrate by the magnetron sputtering method were investigated. The multilayers were differentiated by the number of periods (50, 100 and 150) and by the thickness of 310S steel sublayer (2 nm and 4 nm), while maintaining a constant thickness of the Cu (2 nm). The temperature stability tests were performed in an air atmosphere by isothermal annealing in the temperature range from 23°C to 400°C. It was found that the temperature stability of Cu/310S steel multilayers depends on their thickness. The thickest multilayers show stability up to a temperature of 375°C. Thinner multilayers exhibit stability up to a higher temperature of 400°C, in spite of their thermal expansion coefficients being greater.

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