We demonstrate a high accuracy and throughput automated method for the spatial registration of micron-scale devices on planar chips. The system is used to assess the yield, spatial pitch and rotation of mass transfer-printed membrane devices (here micro-LEDs for illustration) using simple optical microscopy tools.

We demonstrate an automated roll-transfer printing method for the parallel integration of >75k devices in a single shot. Automated high resolution metrology shows semiconductor micro-pixel array transfer with 1.43 µm printing accuracy and 95 % yield.