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Decomposition of ethylene gas by a photocatalyst is an environmentally friendly and sustainable process. We fabricated titanium dioxide thin films deposited on nanostructured tungsten substrates formed by exposure to helium plasma and evaluated their photocatalytic performance. The nanostructures were maintained even after sputtering and annealing, and the proportion of tungsten inside the thin film increased with increasing oxidation temperature. The photocatalytic activity was improved due to formation of the nanostructure.