Institute of Physics at the University of Rostock for the nanoindentation and AFM analysis.Finally I would like to thank my family and friends for the support they have given me during this time.iii Declaration I herewith apply irrevocably to take an oral examination in the form of a public scientic colloquium with examination character.I herewith arm that this work has been written and edited by myself without any help from others and that I have not used any other source than the ones mentioned in this work.I herewith declare that this work has so far been submitted neither to the Faculty of Mathematics and Natural Sciences at the University of Rostock nor to any other scientic institution for the purpose of a PhD. or Rb) as precursor to achieve pure metallic niobium particles on the surface of a variety of metallic and non-metallic substrates has been investigated. To that eect, the inuence on the particle size and morphology of the dierent deposition and decomposition methods as well as the precursor materials has been studied. SST-2 SST method 2. Cluster Solution Spreading and further drying using an ultra-sound bath (atmospheric pressure and room temperature)SST-3 SST method 3. Cluster Solution Spreading and further drying using external heat (laboratory dryer, atmospheric pressure)UV-Vis Ultraviolet-visible