Probes fabricated using multi-layer process are proposed for complex permittivity measurements in microwave frequency range. For multi-layer processing, we have considered LTCC(Low Temperature C O -M Ceramic)and MEMS(Micr0-Electro-Mechanical-Systems) processes to make the probe smaller and thus to be applicable to small biological tissues. We expect the probe size can be reduced to 0.1" by 0.2" if necessary. We also investigate the shielding effect of vias that is normally used to support TEM wave inside the planar transmission line structure. The complex permittivity of 0.9% saline in microwave frequency range(lOOMHz40GHz) was measured using MEMS and LTCC probe to verify the usefulness of the proposed probes.Index Terms -Permittivity measurement, permittivity of biological tissues, MEMS probe, LTCC probe