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Four kinds of azo dyes and their metal-azo dyes were synthesized in order to obtain a high reflective index and better thermal stability as a recording material for DVD-R. Several kinds of novel azo dyes based on benzoic acid, 6-methoxybenzothiazole, benzothiazole-6-carboxylic acid, and benzimidazole have been synthesized. These azo dyes reacted with metal ions, such as Ni2+, Cu2+, Zn2+, and Co2+, as ligands. All structures of the compounds were confirmed by 1H-NMR and FT-IR analyses. The optical and thermal properties of azo dyes and their metal-azo dyes were characterized by UV-vis and TGA analyses. In the UV-vis spectra, the absorption maxima of metal-azo dyes show at longer wavelength than those of azo dyes. These spectral shifts are affected by substituent groups, electron-donating or -withdrawing groups, of azo dyes and metal ions. The metal-azo dyes were thermally stable up to 300 °C, which were confirmed by TGA analyses. Particularly, in the case of an azo dye complexed with Zn based on 6-methoxybenzothiazole, good absorption at 635 nm was observed, and its thermal stability was maintained up to 300 °C, with high refractive index of about 2.08.

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A new positive chemically amplified resist which consists of novel methacrylate terpolymer with bis(trimethylsilyl)isopropyl group and a photoacid generator has been developed for ArF excimer laser photoresists. The polymer structure and properties was evaluated by 'H-NMR, UV, FT-JR. DSC, TGA and GPC. This new terpolymer demonstrates good thermal stability up to 135 °C , good dry-etching resistance, high transparency (75 %) for a ArF excimer laser exposure . Preliminary line and space patterns were obtained using an ArF excimer laser exposure system .

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