Advanced deep reactive ion etching (ADRIE) is a new tool for the fabrication of bulk micromachined devices. Different sensors and actuators which use ADRIE alone or combined with other technologies such as surface micromachining of silicon are presented here. These examples demonstrate the potential and the design freedom of this tool, allowing a large number of different shapes to be patterned and new smart devices to be realized.

In this paper, an improved design of an electrostatic polysilicon microrelay with metallic contacts is presented. The polysilicon layer is used for the actuator while the nickel and gold layers are used for the contacts. Improved contact resistance is demonstrated, as well as the efficiency of multiple contact bars. Moreover, by integrating nickel bars, electromagnetic actuation was successfully performed.

The new linear triamine 2,6-bis(pyrrolidin-2-yl)pyridine (11) has been synthesized, and the (R,S)-, (R,R)-, and (S,S)-isomers have been separated. Compared to other triamines showing a similar structure, these new ligands form very stable Cu2+ complexes. No significant difference is observed between the meso and the racemic forms for their binary or ternary mixed-ligand complexes with the amino acids alanine and praline.

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The X-Ray structures of the 1:l copper(I1) complexes with racemic and optically active (+)-(R,R)-(2,6-bis(pyrro1idin-2-y1)pyridine ((+)-bpp; (+)-I) were determined. Whereas the perchlorate 1 of the racemic complex contains the monomeric units with perfect C, symmetry, the sulfate of the optically active compound crystallizes as a coordination polymer composed of sequences of three different five-coordinate units linked by sulfate bridges around a threefold screw axis (see 2). Formation of the 1:2 complexes of nickel(I1) with (k)-bpp is shown to be highly stereoselective. Acidimetric titrations and CD measurements indicate that the equilibrium mixture contains 99 % of the meso-complex 3 belonging to the point group S4 and only 0.5% of each enantiomer of the C,-symmetric optically active forms. The S4 symmetry of meso-[Ni{ (+)-bpp}((-)-bpp}](C10,), (3) was confirmed by X-ray analysis. The formation of binary complexes of cobalt(II), zinc(II), and cadmium(I1) with (*)-bpp shows an excess of 28,34, and 8%, respectively, of the meso-form over the statistical amount. CD and UVjVIS measurement show a pH-dependent high spin/low spin equilibrium between the octahedral [ N i ( b~p ) ( H~o )~]~+ and the square-planar INi(bun)OHl+ in aaueous solution.