No abstract

To determine the quality and the exact position of interiaces from High Resolution Electron Microscopy (HREM) images. comparison with simulated images is required. In the case of GaAs I AlAs interiaces. the different layers are commonly distinguished by the di.fference in mean intensity between the GaAs and AlAs images. Hov;ever, the mean intensity of a lattice image is influenced by suriace damage resulting from specimen preparation and by inelastic scattering processes. This makes calculation of the mean intensities, and hence comparison between experimental and simulated images, extremely difficult.