No abstract

In many applications up to millions of sensors or actuators have to be interconnected to each other and/or to the outside world, making the monolithic integration of circuitry mandatory. This monolithic integration is also pursued for mass-produced transducers because of economical reasons. CMOS-integrated transducers are thus found in imaging transducers arrays and mass-produced physical sensors. In addition, integrated biochemical sensor arrays can be CMOS-integrated.In this article ®rst a general overview of the ®eld is given and then selected work in the imaging and biochemical ®eld is highlighted. Concerning imaging transducer arrays an overview is given of visible and IR imagers, displays and of inkjet printheads. Concerning the new ®eld of biochemical sensor arrays, two examples are described: a blood-gas sensor and an array of interdigitated electrodes. Finally an overview of the possible technological approaches regarding integrated processing of transducers is presented.

A microsensor array to measure chemical properties of biological liquids is presented. A hybrid integration technique is used to mount four sensor chips on a micro flow channel: a pressure, temperature, pH, combined pO 2 and pCO 2 sensor chip. This results in a microsensor array which is developed to meet the technical requirements for space applications. The integration method allows to integrate other types of sensor chips. This multipurpose and multiuser approach makes the microsensor array suitable for various biochemical applications.

No abstract

No abstract