No abstract

In the process of seismic wave field numerical simulation using finite difference method, the simulation accuracy and computational efficiency is one of the keys to the problem which is especially important to the numerical simulation of small scale geological body which velocity changes violently. In order to describe the local structure of medium subtly and guarantee the efficiency of the simulation, this article introduces the variable grid finite difference method to the staggered grid high-order finite difference numerical simulation on the basic of the traditional staggered grid finite difference algorithm to improve the staggered grid spatial algorithm and avoid the reduction of the simulation accuracy and computational efficiency caused by the interpolation factor. The results show that the variable staggered grid numerical simulation of finite difference algorithm can accurately depict the space variation of underground medium physical properties to further enhance the adaptability of numerical simulation of complex medium, it also can provide reliable basis for wave field imaging and the combined interpretation of p-wave and s-wave.

The etching characteristics of Ta/TaN bilayer barrier films are investigated using a commercial capacitively coupled plasma (CCP) etch system.