A resonant biaxial comb-actuated 7mm-MEMS scanning mirror with tripod-suspension is developed to provide omnidirectional scanning in an automotive time-of-flight LIDAR sensor application. Wafer level vacuum packaging technology is applied to enable circular scanning at 550Hz at large tilt angle

MEMS based laser projection is of high interest for automotive head-up displays and dashboard displays, as well as for an increasing number of personal mobile projection applications. These applications require scanning mirrors that offer high scan frequencies and wide scan angles while showing low power consumption. This paper presents a novel low-power high-Q scanning mirror that is vacuum encapsulated on wafer level and thereby exhibits Q-factors exceeding 145,000. A new glass forming process enables fabrication of glass wafers with inclined 3D-shaped windows needed to spatially separate the direct reflex from the projected image