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Nano/microfabrication experiments on the surface of silicon solar cell are performed by ultraviolet femtosecond laser in the fluence range from 0.10 to 0.70 J/cm2. The surface morphology change of sample was observed by a laser scanning microscopy and a scanning electron microscope. The crystallinity of surface irradiated by laser pulses was evaluated by Raman spectroscopy. The ablation threshold for silicon was estimated to be 0.10 J/cm2. We successfully produced nano‐structures on the surface of silicon solar cell maintaining single‐crystalline with the irradiation at the laser fluence of 0.10 J/cm2.

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