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Abstract-Vector network analyzer (VNA) is versatile measuring equipment which is primarily used for two-port device S parameters measurements. This paper addresses measurement of capacitor parameters using VNA in broad frequency range. The main attention is focused on the measurement accuracy of capacitors parameters using VNA and proper de-embedding of an experimental setup parasitics to get accurate results. Comparative measurement error analysis for different measurement techniques is presented. Suitability of each measurement technique for measurements of capacitor parameters using VNA is discussed and effect of the experimental setup parasitics on the measurement results is addressed. Moreover useful procedures for proper capacitor impedance measurement using VNA are developed.

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