An image sensor for a video camera of 1 000 000 frames per second (fps) was developed. The specifications of the developed sensor are as follows: 1) frame rate: 1 000 000 fps; 2) pixel count: 81 120 (= 312 260) pixels; 3) total number of successive frames: 103 frames; 4) gray levels: 10 b; and 5) open area of each pixel (fill factor): 580 square micrometers (13%). The overwriting function is installed for synchronization of image capturing with occurrence of the target event. Sensitivity is significantly high with the large photogate. Some innovative technologies were introduced to achieve ultrahigh performance, including slanted linear CCD in situ storage, curving design procedure, and a CCD switch with fewer metal shunting wires. They are applicable to the development of other new high-performance image sensors.

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