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In this paper, two CMOS arrays above 0.5 THz are introduced. By coupling numerous radiator elements together, state-of-the-art radiated power is achieved. At 0.59 THz, a coherent radiator array is designed in 40 nm CMOS. Combining 36 coherent radiators on 0.68 mm 2 , it achieves 1 mW radiated power, 24.1 dBm EIRP and 0.8 ‰ DC-to-THz efficiency. Further, a 0.67 THz radiator array using a novel oscillator topology is introduced. The oscillator core benefits from a harmonic tank and a filtering feedback network to increase its harmonic power generation. The array includes 8 intercoupled oscillator cores. This design achieves -16.1 dBm radiated power and 7.4 dBm EIRP in 40 nm CMOS.

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