Integrated photonics facilitates extensive control over fundamental light–matter interactions in manifold quantum systems including atoms1, trapped ions2,3, quantum dots4 and defect centres5. Ultrafast electron microscopy has recently made free-electron beams the subject of laser-based quantum manipulation and characterization6–11, enabling the observation of free-electron quantum walks12–14, attosecond electron pulses10,15–17 and holographic electromagnetic imaging18. Chip-based photonics19,20 promises unique applications in nanoscale quantum control and sensing but remains to be realized in electron microscopy. Here we merge integrated photonics with electron microscopy, demonstrating coherent phase modulation of a continuous electron beam using a silicon nitride microresonator. The high-finesse (Q0 ≈ 106) cavity enhancement and a waveguide designed for phase matching lead to efficient electron–light scattering at extremely low, continuous-wave optical powers. Specifically, we fully deplete the initial electron state at a cavity-coupled power of only 5.35 microwatts and generate >500 electron energy sidebands for several milliwatts. Moreover, we probe unidirectional intracavity fields with microelectronvolt resolution in electron-energy-gain spectroscopy21. The fibre-coupled photonic structures feature single-optical-mode electron–light interaction with full control over the input and output light. This approach establishes a versatile and highly efficient framework for enhanced electron beam control in the context of laser phase plates22, beam modulators and continuous-wave attosecond pulse trains23, resonantly enhanced spectroscopy24–26 and dielectric laser acceleration19,20,27. Our work introduces a universal platform for exploring free-electron quantum optics28–31, with potential future developments in strong coupling, local quantum probing and electron–photon entanglement.

Quantum information, communication, and sensing rely on the generation and control of quantum correlations in complementary degrees of freedom. Free electrons coupled to photonics promise novel hybrid quantum technologies, although single-particle correlations and entanglement have yet to be shown. In this work, we demonstrate the preparation of electron-photon pair states using the phase-matched interaction of free electrons with the evanescent vacuum field of a photonic chip–based optical microresonator. Spontaneous inelastic scattering produces intracavity photons coincident with energy-shifted electrons, which we employ for noise-suppressed optical mode imaging. This parametric pair-state preparation will underpin the future development of free-electron quantum optics, providing a route to quantum-enhanced imaging, electron-photon entanglement, and heralded single-electron and Fock-state photon sources.

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Advancing quantum information and communication requires the control of quantum correlations in complementary degrees of freedom. In this work, we generate electron-photon pair states via inelastic scattering of free electrons at a high-Q photonic-chip-based microresonator. In analogy to spontaneous parametric down-conversion, time-and energy-resolved detection of both particles enables various heralding schemes. We experimentally characterize this new heralded source of single photons and free electrons. Ultimately, these results underpin the recent progress in free-electron quantum optics, promising electron-photon entanglement, tailored photon Fock states, and quantum-enhanced electron imaging.

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