Abstract. This paper presents an approach for modeling and simulation of a new 2D acceleration sensor array using SystemC-AMS. The sensor array consists of six single acceleration sensors with different detection axes. These single sensors comprise of four capacitive segments and one mass segment, aligned in a semicircle. The redundant sensor information is used for offset correction.Modeling of the single sensors is achieved using sensor structure simplification into 11 points and analytic equations for capacity changes, currents and torques. This model was expanded by a PWM feedback circuit to keep the sensor displacement in a linear region. In this paper the single sensor model is duplicated considering different positions of the seismic mass resulting in different detection axes for the single sensors. The measured accelerations of the sensors are merged with different weights depending on the orientation. This also reduces calculation effort.