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The motion of electrons in SF6 in uniform electric fields is simulated using a Monte Carlo technique for the range of reduced electric fields 100≤E/p≤180 V cm−1 Torr−1. The swarm parameters evaluated are compared with the experimental results of drift velocity, ratio of diffusion coefficient to mobility, ionization, and attachment coefficients. The electron-molecule collision cross sections adopted in the simulation result in a good agreement with the experimental values over the range of E/p investigated.

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