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Porous LSCF thin film cathodes suitable for application in Micro Solid Oxide Fuel Cells (μ-SOFCs) were fabricated by spray pyrolysis and pulsed laser deposition. During spray pyrolysis a precursor is sprayed onto a heated substrate, where an amorphous metal oxide film is obtained. Porosity forms during a subsequent annealing process depending on the maximum crystallization temperature. It was possible to fabricate these cathodes with a maximum processing temperature of 650{degree sign}C, which is desirable for the processes and materials involved in μ- SOFCs fabrication. The films are thinner than 1 μm with nanometer-sized grains. The cathode performance was evaluated by determing the area specific resistance. The microstructure proofed to have a strong influence on the cathode performance. Smaller grain sizes led to better performance and can be achieved by low annealing temperature. Furthermore, the microstructure achieved by spray pyrolysis led to better results, than the microstructure achieved by pulsed laser deposition.