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When dealing with high purity gas handling, the nature of metallic surfaces in contact with the gas is a major concern because these surfaces are a possible source of gaseous pollution. Several surface treatments may be applied to stainless steel tubes used in gas handling systems, and these lead to different desorption properties. A comparison of the topographical effects accomplished by roughness and SEM measurements, and chemical effects by XPS determinations was made. Results were correlated to the outgassing behaviour of 316-L SS surfaces, as determined by thermal desorption mass spectroscopy. It appears that similar treatments of 316-L SS may not result in similar outgassing properties. Electropolished surfaces are smoother and present the least outgassing, although carefully cold drawn and chempolished stainless steel surfaces also show a comparable outgassing behaviour.

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