Impedance spectroscopy measurements were carried out in situ on lead zirconate titanate capacitors 1.2×1.2 μm2 in size on a Samsung 4 Mbit 6 in, wafer. We show here that large dielectric loss appears at low frequencies, which is a constriction effect due to the porosity of the platinum electrode. Porous platinum electrodes facilitate an oxygen electrode reaction. The effect may be removed by annealing the platinum electrode at moderate temperature (300 °C). Such an anneal should thus be considered an essential step in the fabrication of a ferroelectric thin-film capacitor on Pt.

These properties enhance the possibility of Mn2+-doped zinc gallate being used as a cathodoluminescent phosphor.