New p rocesses for the AISi / TiM metallization are developed. By simple modifications of the conventional pro cess, P+ contact resistance and its deviation is reduced by more than 50%, and the N+ contact remains good. Reliability implications will also be addressed. This simple process is antic ipated to upgrade the AISi / TiM metallizaiton.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.