This paper experimentally investigates the size-dependent effective Young's modulus () of Aluminum (Al) clamped-clamped microbeams using electrostatic pull-in instability technique. The study presents an experimental characterization of the so-called "length scale parameter" in couple stress theory and surface elasticity. The is retrieved from the measured pull-in voltage, of the clamped-clamped beams with different dimensions, via an electromechanically coupled equation. Measurement results show a strong size-dependence of for the Al beams in small sizes. The Young's modulus increases monotonously as the beams become thinner. The experimental observations are consistent with the published modelling results of the size effects, in which couple stress theory and surface elasticity theory are taken into consideration. The presented experimental method has substantial advantages
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