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The paper deals with single wavelength optical monitoring in batch type coating systems. Both indirect monitoring on stationary test slides and direct monitoring on a fast rotating substrate holder was investigated. Application results will be presented.

We present a thorough study of a bandpass filter for near-IR region, with bandwidth below 20 nm, high transmission, broad rejection band [350-1100] nm. This filter is angularly tunable between 0 and 50° and shows a shift of the central wavelength from 970 nm down to 880 nm without major changes of its bandwidth and spectral shape for unpolarized light. We first provide a description of the design procedure and then carry out an experimental demonstration using plasma enhanced reactive magnetron sputtering. We finally present an accurate characterization of this class of filter using a custom optical system.