Electrochemical processing can potentially be used for the cost-effective and large-scale fabrication of solar cells based on nanostructured Si thin films. Herein, we fabricated Si thin films for solar cell applications by electrodeposition in ionic liquids and performed a systematic investigation of film structure control and doping effects. Notably, relatively smooth and compact films were obtained by the modulation of the rest time during the electrodeposition under light irradiation, and the addition of AlCl 3 to the electrolyte allowed the electrodeposition of p-type Si thin films.

Ma n y o xi d e s, c a rb i d es a nd n it r i de s of t h e