Advanced devices are not only driven by minimum device geometry, performance enhancement, and cost issues, but also require a low power consumption. Device scaling for higher performance and lower power consumption necessitates the introduction of advanced process modules, new materials new device architectures and, finally, even the use of alternative device operation principles compared to the standard MOS transistor. Several of these advanced devices will be discussed in view of their scalability and their potential for coping with the ITRS roadmap. Key performance parameters will be investigated.