In this paper, we will propose the neural networks integrated circuit (NNIC) which is the driving waveform generator of the 4.0, 2.7, 2.5 mm, width, length, height in size biomimetics microelectromechanical systems (MEMS) microrobot. The microrobot was made from silicon wafer fabricated by micro fabrication technology. The mechanical system of the robot was equipped with small size rotary type actuators, link mechanisms and six legs to realize the ant-like switching behavior. The NNIC generates the driving waveform using synchronization phenomena such as biological neural networks. The driving waveform can operate the actuators of the MEMS microrobot directly. Therefore, the NNIC bare chip realizes the robot control without using any software programs or A/D converters. The microrobot performed forward and backward locomotion, and also changes direction by inputting an external single trigger pulse. The locomotion speed of the microrobot was 26.4 mm/min when the step width was 0.88 mm. The power consumption of the system was 250 mWh when the room temperature was 298 K.

Micro-robotic systems are increasingly used in medicine and other fields requiring precision engineering. This paper proposes a piezoelectric impacttype rotary actuator and applies it to a millimetre-size robot controlled by a hardware neuron model. The rotary actuator and robot are fabricated by micro-electromechanical systems (MEMS) technology. The actuator is composed of multilayer piezoelectric elements. The rotational motion of the rotor is generated by the impact head attached to the piezoelectric element. The millimetre-size robot is fitted with six legs, three on either side of the developed actuator, and can walk on uneven surfaces like an insect. The three leg parts on each side are connected by a linking mechanism. The control system is a hardware neuron model constructed from analogue electronic circuits that mimic the behaviour of biological neurons. The output signal ports of the controller are connected to the multilayer piezoelectric element. This robot system requires no specialized software programs or A/D converters. The rotation speed of the rotary actuator reaches 60 rpm at an applied neuron frequency of 25 kHz during the walking motion. The width, length and height of the robot are 4.0, 4.6 and 3.6 mm, respectively. The motion speed is 180 mm/min.

We report the hexapod microrobot controlled by the bare chip IC of hardware neural networks. MEMS (micro electro mechanical systems) technology is used for fabrication of the microrobot. Lead zirconium titanate (PZT) and shape memory alloy (SMA) are used in each actuator, respectively. As the result, PZT type is realized the walking motion by bare chip IC. Moreover, SMA type shows the hexapod walking locomotion with mounted bare chip IC. The walking speed is 2.4mm / min and the step width was 0.083mm.

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