A micro-drive system is a key part of macro-micro-drive technology and precision positioning technology in which a micro-drive reduction system can provide more precise motion and suitable small space motion. Therefore, it is necessary to study precision micro-drive reduction systems. In this paper, based on the design of a micro-drive reduction mechanism without force and displacement in non-motion direction, a precision micro-drive reduction system driven by a piezoelectric ceramic actuator (PZT) was designed, and the strength, dynamic and motion performance of the system was analyzed. First, based on the principle of a flexure hinge lever and the principle of balanced additional force, a type of precision micro-drive reduction mechanism with an adjustable reduction ratio was designed. Second, the strength performance of the system was analyzed by finite element analysis, and the dynamic performance of the system was analyzed by finite element analysis and experiments. Finally, the kinematic performance of the system was analyzed by theoretical analysis, the finite element method and experiment, and the motion linear equation was calculated based on the linear fitting equations of three methods. The study results showed that the system had good strength and dynamic performances, and the system’s motion had the advantages of high precision and good linearity. This research has certain reference value for the design and performance research of micro-drive mechanisms.

In this paper, a sub-arc-second macro/micro dual-drive rotary system is designed, and the continuous compensation of the system error and its experimental research are completed. First, the macro-drive system is driven by a direct-drive motor, and the micro-drive system uses a piezoelectric ceramic to drive the micro-drive rotary mechanism; the system uses a micro-drive system to compensate the motion error of the macro-drive system, and uses circular grating to feedback the displacement of the macro/micro total output turntable to form a macro/micro dual-drive closed-loop control system. Second, based on the establishment of the system error model, the design of the system’s continuous error compensation scheme is completed. Finally, the positioning accuracy testing of the system, direct error compensation of the macro-drive, manual error compensation of the macro-drive, error compensation performance of the micro-drive part and macro/micro compensation of the system are carried out in the study. The results show that the repeated positioning error and the positioning error of the system are reduced by 78.8% and 95.2%, respectively, after macro/micro compensation. The correctness and effectiveness of the designed system design, error compensation and control method are verified through performance tests, and its positioning accuracy is verified to the sub-arc-second (0.1 arcsecond) level. The research in this paper has important reference value for the development of ultra-precision macro/micro dual-drive technology.