No abstract

D N ) generates summary data, and then WEB will highlight issue and provide input suggestion base on pre-defmed rule. Abstract -Test Wafers are used in wafer fabrication to monitor equipment stability andproduct quality. Any shortage will cause the loss of equipment capacity and production move. On the contrary prepare more test wafers to avoid shortage will spend more cost, occupy more storage space, and lower transfer eficiency. Considering the wafer cost and FAB productiviw, an eficient control system of test wafer in 300 mm FAB is much more important than formerly. *=.I4 ,.,hXlpi, -wl. l b . e=,,