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In this paper advanced OPC (Optical Proximity Correction) methods, additional with assistant features, and non-obvious methods were implemented to correct aberrations caused by aggressive illuminations in order to optimize the shape of the finger tips. OPC model and simulations were verified using 2D verification method.

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We propose a new design of 25-GHz flat-top multichannel optical filter. The flat-top of optical filters can improve to 2.288×10 -11 dB which is superior to that of 5 orders of previous study. The superior performance of dispersion and channel spacing isolation improve 73.5% and 94%, respectively, which compared with previous study.