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A UV light activated SnO2 thin film nitrogen dioxide sensor was fabricated by DC sputtering and oxidation. It can be directly placed in the air to detect the concentration of NO2 at RT, with a detection limit of 5 ppb. Experiments show that the sensor has good selectivity and stability. SEM, XRD, and TEM characterization indicate that the sample is mainly composed of tetragonal rutile phase SnO2. The surface presents a rough and porous granular structure, which is suitable for gas adsorption. The effect of operating temperature on NO2 sensing of SnO2 thin film gas sensor was systematically investigated. Therefore, the fabricated SnO2 thin film NO2 sensor has the promise to greatly reduce power consumption and can be used in a wider range of fields because of its characteristic that it can work normally at RT.

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