No abstract

Polymerizable nematic liquid crystal ͑LC͒ was adopted as a resist for our newly developed nanoimprinting lithography process. Liquid crystal molecules were self-aligned during imprinting process without precoated alignment layer. The large patterned area was able to achieve 4 ϫ 4 cm 2 at very low impriting pressure, 1.5 bar. The optical anisotropic was verified through polarized optical microscopy and the retardation was measured by polarized ultraviolet/visible spectrometer. The micrograted LC films prepared by this novel method offer the potential applications for a LC alignment layer within LC cells, as well as preparation of optical anisotropic films.

This paper presents a feasibility study of using a virtual survey instrument, SimuSurvey, for surveyor training. SimuSurvey was developed for visualizing and simulating surveying scenarios in a computergenerated virtual environment. In this research, we studied the feasibility of introducing the use of SimuSurvey in regular surveyor training courses. Both quantitative and qualitative evaluation methods were used. The quantitative evaluation method included soliciting responses to a questionnaire from 323 students from four departments in three different schools; and testing 205 students with an in-class quiz that followed a 25-min training session on SimuSurvey. The purpose of the questionnaire was to understand the attitudes of students toward using virtual surveying instruments in a training course. The results show that 91% of the students believe that using virtual surveying instruments in training will benefit their learning experience. The results from the inclass quiz indicate that the employment of SimuSurvey can enhance learning outcomes of the students, with approximately two-thirds of participating students being able to answer follow-up questions correctly. The qualitative analysis was obtained from interviewing five experienced instructors of different backgrounds. They were generally optimistic to the idea of including SimuSurvey in regular surveyor training. ß

A new wire grid polarizer is made through a series of nanofabrication steps. The visible light polarization effect will occur when natural incident light interact with the novel double layers metal nano‐grating structure on the surface of said polarizer. It gives very high extinction ratio and also no angular dependency. Theoretically, even the incident angle is over 75°, it still possible to give polarization extinction ratio over 5000:1. The feature sizes of the nano‐grating structures have major influence to the polarization states of the reflective and transmitting light. The materials compose the nano grating structure and the morphology also affects the polarization effect. A 5mm × 5mm sample was made and the results will present in this paper.

The design of a high speed electron-beam lithography column is described. Designed for use with a high speed raster scan system, the column produces a beam current of 600 nA in an 0.5 μm round spot, and has a deflection field of 5 mm2. The column uses a zirconiated thermal field emission cathode, two magnetic lenses, with an intermediate cross-over for blanking purposes, and a two-stage electrostatic deflection system, producing both speed and precision. The column is compatible with a 300 MHz pixel exposure rate and has an accuracy of better than ±0.125 μm (2σ).