This study was to evaluate the change in characteristics of concentration of ozone after exposure to high energy radiation in linac room. Background ozone concentration of linac room was measured and compared to ozone concentration around linac room. Background ozone concentration of linac room was mean 17.4±7.9 ppb. It was 50% of the ozone concentration(36.8±22.3 ppb) around linac room(p<0.05). The concentration of ozone after exposure to high energy radiation in linac room was elevated to double of background ozone level, intensity after exposure. with exposure time concentration of ozone increased proportionally. It showed maximum level at 130~180seconds and slowed a tendency to saturate. It required more than 10 minutes for ozone concentration in linac room to drop to ozone concentration around linac room. The concentration of ozone after exposure to high energy radiation is high enough to cause specific physical symptoms, such as acute dyspnea or chest pain due to dry cough. Exposure to high concentration of ozone in sealed linac room can aggravate pulmonary disease, so special attention is needed.