Integrated optical waveguide polarization converters are among the essential components for constructing various functional optical integrated circuits. The RM materials have been widely used in liquid crystal displays for fabricating waveplates. In this work, the polarization converters are fabricated by using a solution of Reactive Mesogen(RM) dissolved in liquid crystal(LC). In the middle of the polymer waveguide, a groove is defined by an oxygen plasma etching in a direction perpendicular to the optical waveguide. The solution of RM-LC is inserted to fill up the groove, and then liquid crystal is aligned in a certain direction by applying an electric field. After the alignment, RM materal is crosslinked by UV light so as to form a permanent waveplate. The phase retardation of the waveplate is determined by the width of the groove, and by the birefringence and the degree of alignment of the LC. Polarization conversion efficiency of 90% is obtained for the wavelength of 1550 nm.
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