The usual electrodes from electrophysiology are resistive. A variable metal-skin contact resistance frequently generates unpleasant artifacts. The capacitive electrodes avoid this disadvantage and are suitable for variable biosignals recording. The main novelty of this paper is the manufacturing of capacitive electrodes with all terminals on the top surface, letting free the electrode bottom for physiological preparations.So, the paper firstly presents the TCAD techniques used for the design of some capacitive electrode using three mask levels. By EDA, L-EDIT tools, the layers that constitute the fabrication masks are transferred to the glass support. In the last part, the electrodes technological flow design and testing in a real electrophysiological platform using the capacitive electrodes, are presented.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.