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A fabrication technique for 3D metal microstructures using hybrid process integrated micromachining and welding on a workstation is described in the paper. The system uses a micro-EDM (micro electro-discharge machining) process to fabricate microparts, and Nd-YAG laser welding to microassemble these microparts precisely. A diverse pattern of 3D metal microstructures or micromoulds can be attained via further machining procedures controlled by a CAD/CAM path after assembling. Since the product is completed in one integrated manufacturing process, some particular problems resulting from their small dimensions can be overcome, e.g. their high failure sensitivity, and the required micro-precision in the microassembly process. Using these procedures, diverse patterns, and high aspect ratios and high joint strength microstructures can be created precisely.To illustrate the microassembly strategies and procedures, a diverse pin-plate metal microstructure has been used and discussed in the study. It requires that the perpendicular tolerance between pin and plate, and the parallel tolerance between pins are good, and the twisting strength at the joint is strong. A diverse feature on the top of the pin was then further machined as a square, or hollow construction having an equiangular partition.

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