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Articles you may be interested inScanning microwave microscopy/spectroscopy on metal-oxide-semiconductor systems Local strain measurement in a strain-engineered complementary metal-oxide-semiconductor device by geometrical phase analysis in the transmission electron microscope Appl. Phys. Lett. 93, 081909 (2008); 10.1063/1.2970050 Two-dimensional characterization of carrier concentration in metal-oxide-semiconductor field-effect transistors with the use of scanning tunneling microscopy J. Vac. Sci. Technol. B 22, 358 (2004); 10.1116/1.1627792Two dimensional dopant and carrier profiles obtained by scanning capacitance microscopy on an actively biased cross-sectioned metal-oxide-semiconductor field-effect transistor Comparison of two-dimensional carrier profiles in metal-oxide-semiconductor field-effect transistor structures obtained with scanning spreading resistance microscopy and inverse modelingIn this paper, an analytical model for phase and amplitude sensitive scanning microwave microscopy on metal-oxide-semiconductor structures is presented. The phase and amplitude of the microwave signals are calculated as a function of operation frequency, oxide thickness, tip radius, bias, and doping level. For doping profiling applications it is found that both the microwave amplitude and phase signals can be used. Under appropriate operation conditions, the phase signals can be larger by a factor of 40. Series resistances turn out to be problematic as they lead to non-monotonic contrast at low doping levels. The phase and amplitude behavior on a material system with a frequency dependent dielectric constant is also investigated and the possibilities of complex impedance spectroscopy are explored. V C 2012 American Institute of Physics. [http://dx.

We present a large area (1 cm2) nanoimprinted metamaterial comprising a fishnet structure and its Babinet complement, which shows giant cross polarization. When illuminated with s-polarized light, the reflected beam can be p-polarized up to 96%, depending on the azimuthal orientation of the sample. This experimental result is close to the result of numerical simulations, which predict 98.7% of cross-polarization. It is further shown, that 95-100% cross polarization is only achieved in the case when the fishnet is combined with its Babinet complement. Each structure alone (either an ordinary fishnet or a plane with metallic rectangles only) shows substantially less polarization conversion.