Arrays of highly strained 5-25 nm-wide regions have been prepared on rutile TiO2(110) surface through a low energy Ar ion bombardment technique. Using scanning tunneling microscopy (STM) and an innovative STM tip-triggered nanoexplosion approach we show experimentally that the protrusions arise from subsurface Ar-filled pockets. Continuum mechanics modeling gives good estimates of the corresponding elastic deformation. Surface strain values of up to 4% have been deduced.

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