A method for the determination of the depth distribution of light elements in heavy materials is described. It involves the detection of light elements recoiling under the bombardment by a 35Cl beam. A resolution of 300 Å was achieved for the lithium present in a thin sample. The measures were done with layers of 1016 atoms/cm2 and it is estimated that quantities as small as 1014 atoms/cm2 can be located without much difficulty.

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