Thin films of Sr2FeMoO6 (SFMO) are grown on SrTiO3 (001) substrates by pulsed laser deposition. The best films provide 3.2μB∕f.u. at 5K, a Curie temperature above 400K, low roughness, high crystallinity, and low splashing. Therefore, the use of such SFMO electrodes in magnetic tunnel junctions patterned with conventional lithography is promising. Pseudomorphic epitaxial growth is obtained for thicknesses under 50nm. Above this thickness the films do not relax homogeneously. A coherent and systematic variation of the magnetization with the deposition conditions is obtained, which highlights a high reproducibility. Under a reasonable O2 partial pressure to avoid parasite phases, the limiting factor for high magnetization is the total pressure or the deposition rate. Therefore, the deposition rate is suspected to have a strong influence on the Fe∕Mo ordering. Highly magnetic samples are obtained under a low gas flow of either a 20% O2+N2 or a 0.3% O2+Ar.
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