We report on photoassisted wet chemical formation of thin oxide films on n-GaN layers in potassium hydroxide based electrolytes at room temperature. The kinetics of the oxide formation and dissolution were examined via photocurrent transients. The tendency of the photocurrent to level out during photoelectrochemical etching experiments is associated with a quasiequilibrium state at the semiconductor/electrolyte interface. Homogeneous oxide films were grown in weak alkaline solutions (11<pH<13) under potentionstatic control with oxidation rates of up to 250 nm/h and characterized by Auger electron spectroscopy. Consequences on wet photochemical etch strategies are discussed.

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Radiation-induced point defects and their annealing in silicon-doped n-GaN have been investigated by means of Hall effect measurements and Raman spectroscopy. Correlated compensation effects due to simultaneous introduction of donor and acceptor centres are observed in irradiated n-GaN. The defect production rate is dependent on the dopant concentration. This means that the model of all native defects immobile at room temperature is not true. The behaviour of radiation-induced defects upon heating is complicated, exhibiting two prominent stages of reverse annealing. The presence of radiation defects is still observable after annealing to T = 750 • C.

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