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Multilayer piezoelectric actuators when driven under high frequency, generate significant heat, which influences the reliability and other piezoelectric properties. In this paper, heat generation in various types of multilayer PZT‐based actuators was studied. Experimental results showed that heat generation is mainly caused by ferroelectric hysteresis loss in the stress‐free state. A simplified analytic method was established to evaluate the temperature rise, which is useful for the design of multilayer and other high‐power actuators.

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