This paper describes the fabrication and testing of a one-axis polymer-based capacitive accelerometer made using a reel-to-reel/roll-to-roll compatible, printing-based process. The accelerometer is a suspended parallel-plate sense capacitor made from a laser-printed polystyrene composite material on a flexible plastic substrate. With a simple analog voltage readout circuit, device sensitivity is 58mV/g with +/-1.5g range. This device demonstrates fabrication of ultra-low-cost MEMS sensors on flexible polymer substrates.
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