We report on the mechanical friction method for a fabrication of a Si nanostructure on a H-passivated Si͑100͒ substrate using an atomic force microscope ͑AFM͒ in a contact mode in air. The bare Si surface region exposed by the mechanical friction between a silicon nitride tip and Si surface was fully oxidized by ambient oxygens. The oxide mask patterns could withstand a selective wet etching process for pattern transfer. The width of the oxide layer formed by an AFM tip was about 200 Å. As the etching time and scan rate were decreased, the oxide line shape was improved. This study also showed that there exists a critical tip force in the removal of a H-passivating layer.

Abstract. In this paper, we present a new method to calculate reinforcement value in QoS routing algorithm for real-time multimedia based on Ant algorithm to efficiently and effectively reinforce ant-like mobile agents to find the best route toward destination in a network. Simulation results show that the proposed method realizes QoS routing more efficiently and more adaptively than those of the existing method thereby providing better solutions for the best route selection.